Development of new X-ray microscopy using a low-energy electron beam

Recently, a low-energy electron (ca. 1 keV) excited X-ray microscopy has been developed using the time-of-flight technique in an ultra-high vacuum. Since this X-ray microscope is an application of an electron-stimulated desorption (ESD) microscope, surface hydrogen detection and the Auger electron spectroscopy are also available at the same probing point on the surface. In this report, X-ray microscope and ESD microscope images are demonstrated for a micro-channel plate and Cu-mesh in the electron energy ranging from 900 eV to 1.4 keV with a spatial resolution of ca. 50 nm to 100 nm.