Development of imaging energy analyzer using multipole Wien filter

We discussed a new design of aWien filter energy analyzer for an energy-filtered X-ray photoemission electron microscopy system. We have demonstrated that the second-order aberration and the third-order aperture aberration can be corrected by the multipole Wien filter by adjusting multipole components of electric and magnetic fields up to octupole components. The threedimensional charge simulation method indicated that 12 electrodes and magnetic poles can effectively reproduce these ideal electric and magnetic fields.