• Title of article

    Ion bombardment induced interface broadening in Co/Cu system as a function of layer thickness

  • Author/Authors

    A. Barna، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2005
  • Pages
    5
  • From page
    375
  • To page
    379
  • Abstract
    It has been shown recently that in case of bilayers ion bombardment induced interface roughening occurs if the sputtering yields of the adjacent layers are strongly different. Now we checked the effect of this mechanism on AES depth profiling if the thickness at least one of the layers is small compared to the thickness of ion mixed layer. It turned out that in this case the ion bombardment induced interface roughening is negligible, since the ion mixing eliminates the differences of the sputtering yields
  • Keywords
    AES depth profiling , Ion bombardment induced interface broadening , TRIM simulation , Co/Cu system , Thin film analysis
  • Journal title
    Applied Surface Science
  • Serial Year
    2005
  • Journal title
    Applied Surface Science
  • Record number

    1000739