Title of article
Ion bombardment induced interface broadening in Co/Cu system as a function of layer thickness
Author/Authors
A. Barna، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
5
From page
375
To page
379
Abstract
It has been shown recently that in case of bilayers ion bombardment induced interface roughening occurs if the sputtering
yields of the adjacent layers are strongly different. Now we checked the effect of this mechanism on AES depth profiling if the
thickness at least one of the layers is small compared to the thickness of ion mixed layer. It turned out that in this case the ion
bombardment induced interface roughening is negligible, since the ion mixing eliminates the differences of the sputtering yields
Keywords
AES depth profiling , Ion bombardment induced interface broadening , TRIM simulation , Co/Cu system , Thin film analysis
Journal title
Applied Surface Science
Serial Year
2005
Journal title
Applied Surface Science
Record number
1000739
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