Coating tips used in electrical scanning probe microscopy with W and AuPd

A conductive tip is essential for probing the electrical characterization in scanning probe microscopy (SPM). This study investigates the efficiency of Wand AuPd as coating materials in a silicon cantilever for application to conductive SPM. The results show that the two self-coated probes could both be used in SCM and SPO modes. However, they were not appropriate for use in CAFM mode because the conductive films do not strongly resist wear. The presented AuPd probe outperforms the W probe because it more strongly resists the oxide formation at the end of tip.