Title of article
Effect of primary oxygen ion implantation on SIMS depth profiling in glasses§
Author/Authors
Marek Tuleta *، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
4
From page
6107
To page
6110
Abstract
The influence of the primary oxygen ion implantation on SIMS in-depth profiles in halide and chalcogenide glasses was examined. Various
behaviours of particular profiles were generally explained in terms of the chemical affinity of analysed reactants and modifications of the glass
structure induced by primary ions
Keywords
Ion implantation , SIMS depth profiles , Matrix effect
Journal title
Applied Surface Science
Serial Year
2006
Journal title
Applied Surface Science
Record number
1002302
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