Sputtering of amorphous ice induced by C60 and Au3 clusters

Molecular dynamics simulations were performed to study the behavior of cluster SIMS. Two predominant cluster ion beam sources, C60 and Au3, were chosen for comparison. An amorphous water ice substrate was bombarded with incident energy of 5 keV. The C60 cluster was observed to shatter upon impact creating a crater of damage approximately 8 nm deep. Although Au3 was also found to both break apart and form a damage crater, it continued along its initial trajectory causing damage roughly 10 nm deep into the sample and becoming completely imbedded. It is suggested that this difference in behavior is due to the large mass of Au relative to the substrate water molecule