Title of article
Molecular depth profiling of organic and biological materials
Author/Authors
John S. Fletcher، نويسنده , , Xavier A. Conlan، نويسنده , , Nicholas P. Lockyer، نويسنده , , John C. Vickerman، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
4
From page
6513
To page
6516
Abstract
Atomic depth profiling using secondary ion mass spectrometry, SIMS, is common in the field micro-electronics; however, the generation of
molecular information as a function of sample depth is difficult due to the accumulation of damage both on and beneath the sample surface. The
introduction of polyatomic ion beams such as SF5 and C60 have raised the possibility of overcoming this problem as they deposit the majority of
their energy in the upper surface of the sample resulting in increased sputter yields but with a complimentary reduction in sub-surface damage
accumulation. In this paper we report the depth profile analysis of the bio-polymer polycaprolactone, PCL, using the polyatomic ions Auþ3
and Cþ60
and the monoatomic Au+. Results are compared to recent analysis of a similar sample using SFþ5
. Cþ60 depth profiling of cellulose is also
demonstrated, an experiment that has been reported as unsuccessful when attempted with SFþ5
implications for biological analysis are discussed
Keywords
TOF-SIMS , Polyatomic ion beams , Molecular depth profiling
Journal title
Applied Surface Science
Serial Year
2006
Journal title
Applied Surface Science
Record number
1002371
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