Polyethylene terephthalate (PET) bulk film analysis using C60 +, Au3 +, and Au+ primary ion beams

The damage characteristics of polyethylene terephthalate (PET) have been studied under bombardment by C60 +, Au3 + and Au+ primary ions. The observed damage cross-sections for the three ion beams are not dramatically different. The secondary ion yields however were significantly enhanced by the polyatomic primary ions where the secondary ion yield of the [M + H]+ is on average 5 higher for C60 + than Au3 + and 8 higher for Au3 + than Au+. Damage accumulates under Au+ and Au3 + bombardment while C60 + bombardment shows a lack of damage accumulation throughout the depth profile of the PET thick film up to an ion dose of 1 1015 ions cm 2. These properties of C60 + bombardment suggest that the primary ion will be a useful molecular depth profiling tool.