SIMS analysis using a new novel sample stage

We have developed a novel sample stage for Cameca IMS-series instruments that allows us to adjust the tilt of the sample holder and to vary the height of the sample surface from outside the vacuum chamber. A third function of the stage is the capability to cool sample to 150 8C using liquid nitrogen. Using this stage, we can measure line profiles of 10 mmin length without any variation in the secondary ion yields. By moving the sample surface toward the input lens, the primary ion beam is well focused when the energy of the primary ions is reduced. Sample cooling is useful for samples such as organic materials that are easily damaged by primary ions or electrons.