Abstract :
In this study, the effects of an (NH4)2Sx treatment on the surface work function (SWF) and roughness of indium–tin-oxide (ITO) have been
investigated. From the observed X-ray photoelectron spectroscopy results, optical transmittance measurements, atomic force microscopy
measurements and four-point probe measurements, it is suggested that the surface chemical changes and an increase in the sheet resistance
had strong effects on the SWF of ITO.We find that the S occupation of oxygen vacancies near the ITO surface after (NH4)2Sx treatment may result
in a marked increase in the SWF and a slight increase in the surface roughness.
Keywords :
ITO , Work function , XPS , Surface treatment