Title of article :
Modeling the effects of cohesive energy for single particle on the
material removal in chemical mechanical polishing at atomic scale
Author/Authors :
Yongguang Wang، نويسنده , , Yongwu Zhao *، نويسنده , , Wei An، نويسنده , , Jun Wang، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Abstract :
This paper proposes a novel mathematical model for chemical mechanical polishing (CMP) based on interface solid physical and chemical
theory in addition to energy equilibrium knowledge. And the effects of oxidation concentration and particle size on the material removal in CMP
are investigated. It is shown that the mechanical energy and removal cohesive energy couple with the particle size, and being a cause of the nonlinear
size-removal rate relation. Furthermore, it also shows a nonlinear dependence of removal rate on removal cohesive energy. The model
predictions are in good qualitative agreement with the published experimental data. The current study provides an important starting point for
delineating the micro-removal mechanism in the CMP process at atomic scale
Keywords :
Binding energy , modeling , Atomic scale , chemical mechanical polishing
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science