Author/Authors :
Wooseok Song، نويسنده , , Yooseok Kim، نويسنده , , Dae Sung Jung، نويسنده , , Su Il Lee، نويسنده , , Woosung Jung، نويسنده , , O.-Jin Kwon، نويسنده , , Heun Ku Kim، نويسنده , , Mi-Sun Kim، نويسنده , , Ki-Seok An، نويسنده , , Chong-Yun Park، نويسنده ,
Abstract :
We demonstrate boron and nitrogen co-doping of diamond-like carbon (DLC) film by vaporizing borane ammonia for applications in anti-scratch and extremely robust transparent conductive films. This method allows for facile fabrication of boron and nitrogen co-doped DLC (BNDLC) film with ultra-flat surface and uniform thickness. The simultaneous occurrence of graphitization and boron and nitrogen co-doping of DLC film induced by increasing the co-doping temperature was observed and lead to a significant decrease in the sheet resistance. As a result, the sheet resistance and optical transmittance at 550 nm of the BNDLC were 3.53 ± 0.19 kΩ/sq and 81.25%, respectively.
