Author/Authors :
Yanyan Zhang، نويسنده , , Wuyou Fu، نويسنده , , Haibin Yang، نويسنده , , Qi Qi، نويسنده , , Yi Zeng، نويسنده , , Tong Zhang، نويسنده , , Ruixia Ge، نويسنده , , Guangtian Zou، نويسنده ,
Abstract :
The highly ordered TiO2 thin films are prepared by anodic oxidation and calcined at 300, 400, 500 and 600 °C, respectively. X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) are employed to analyze the structure and the morphology of the TiO2 films. We design a novel sensor to investigate the humidity sensing behaviours of the samples. The samples calcined at 600 °C show high sensitivity with nearly two orders change in the resistance and short response and recovery time (<190 s) during the relative humidity variation from 11 to 95%.
Keywords :
Titania nanotubes , Anodization , Nanostructure , Humidity sensor , Thin film
