Title of article
Investigation of thin TiO2 films cosputtered with Si species
Author/Authors
Jin-Cherng Hsu، نويسنده , , Cheng-Chung Lee*، نويسنده , , Huang-Lu Chen، نويسنده , , Chien-Cheng Kuo، نويسنده , , Paul W. Wang *، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2009
Pages
7
From page
4852
To page
4858
Abstract
Pages 4852-4858
Keywords
Bridging oxygen , Low-binding-energy oxygen , Titanium dioxide , X-ray photoelectron spectroscopy , Cosputtering , High-binding-energy oxygen , Ion-beam-sputtering deposition
Journal title
Applied Surface Science
Serial Year
2009
Journal title
Applied Surface Science
Record number
1011189
Link To Document