Optical properties of titanium oxycarbide thin films

The optical properties of TiCxOy thin films, deposited by reactive dc magnetron sputtering at different oxygen flow, were investigated by spectroscopic ellipsometry in the energy range of 0.75–4.5 eV. The dielectric functions measured in the energy range of intraband transitions were analyzed using the classical Drude theory. These results show that free plasma energy and the damping constant of the films depend strongly on film stoichiometry and on their oxygen content. The interband contribution to the optical conductivity of these films is in good agreement with the optical conductivity obtained from first principles calculations based on density functional theory. Both the experimental and the calculated results show that it is possible to significantly modify the optical properties of titanium oxycarbide by adjusting the oxygen content.