Preparation of Titanium Oxide-containing Organic Film by Dipping Ti(OR)4 and Cold Plasma oxidizing on PET

Low temperature process to prepare titanium oxide film on the surface of PET was investigated in this study. The substrates were pre-treated by oxygen plasma activated procedure, and then spin coating of Ti(OR)4 precursor solution was carried out to prepare Ti-containing organic films. Finally, O2 plasma was employed to decompose organic compounds and oxidize Ti to form oxides. Oxygen plasma post treatment can oxidize the organic compounds to form titanium oxide carbon subsequently. From the IR and ESCA analysis could be observed that –CH bond decreases and Ti–O, C–O bonds increase after O2 plasma treatment. Their surface hydrophilicity was enhanced by UV-irradiation, the degree of water contact angle decreased from 60° to 10°.