Modeling of H2O adsorption-induced curvature of a metal/silicon nanocantilever

A model to calculate the curvature of H2O adsorption-induced bending for a metal/silicon nanocantilever is proposed based on atomic and molecular interaction. Part of the potential of both adsorbates and substrate transfers to the elastic energy of the cantilever, and the total energy of the system reaches a minimum value when adsorption is stable. According to this principle the model is developed to calculate H2O adsorption-induced curvature of the nanocantilever. The model was tested with the molecular dynamics method using Material Studio software. The results agree with theoretical value. This model gives us a simple method to calculate adsorption-induced bending of the nanocantilever.