Title of article
Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH
Author/Authors
Shigeki Matsuo، نويسنده , , Haruki Sumi، نويسنده , , Satoshi Kiyama، نويسنده , , Takuro Tomita، نويسنده , , Shuichi Hashimoto، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2009
Pages
3
From page
9758
To page
9760
Abstract
A femtosecond laser-assisted etching technique was applied to Pyrex glass, a kind of borosilicate glass, to perform removal processing with three-dimensional arbitrarity in design and micrometer-order spatial resolution. An aqueous solution of potassium hydroxide (KOH) was adopted as a highly selective etchant. The rate and selectivity of etching were evaluated from in situ images, and fabrication of three-dimensional microchannels was demonstrated.
Keywords
Selective etching , Potassium hydroxide (KOH) , Pyrex glass , Femtosecond laser-assisted etching
Journal title
Applied Surface Science
Serial Year
2009
Journal title
Applied Surface Science
Record number
1012341
Link To Document