Electroforming of continuous Al-AlN granular films

Continuous Al-AlN granular films (Al granules embedded in the AlN matrix) were proposed to serve as surface conduction-electron emission emitters. The electroforming process and the electron emission characteristics of the continuous Al-AlN granular films were investigated. The electroforming mechanism of the Al-AlN granular film emitter could be attributed to the fact that the Al granules were evaporated from the Al-AlN granular films. The voltage control negative resistance (VCNR) properties of the Al-AlN granular films could be repeated with periodic changes of the device voltage during electroforming. After electroforming, the nano-fissures with a width of 60–250 nm on the surface of Al-AlN granular films were obtained. A stable electron emission current of 2.79 μA for a line array with 18 electron emitters could be reproducibly observed at a device voltage of 13 V and anode voltage of 2.5 kV.