Oxygen pressure dependent interfacial polarization of perovskite oxide multilayers on Si substrates

The SrTiO3/La0.9Sr0.1MnO3 (STO/LSMO) multilayers were fabricated on n-Si (1 0 0) substrates using a computer-controlled laser molecular-beam epitaxy (MBE) technique at 1 × 10−2 Pa and 2 × 10−4 Pa oxygen partial pressures, respectively. The dielectric properties of the multilayers (MLs) were investigated. The differences of the dielectric properties of the two samples were explained by an impedance analysis technique, which indicates that the interfacial polarization has a close relationship with the oxygen pressure.