Title of article :
GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
Author/Authors :
M. Bosund، نويسنده , , Severi P. Mattila، نويسنده , , A. Aierken *، نويسنده , , T. Hakkarainen، نويسنده , , H. Koskenvaara، نويسنده , , M. Sopanen، نويسنده , , V.-M. Airaksinen، نويسنده , , H. Lipsanen، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2010
Pages :
4
From page :
7434
To page :
7437
Abstract :
A low-temperature passivation method for GaAs surfaces is investigated. Ultrathin AlN layers are deposited by plasma-enhanced atomic-layer-deposition at 200 image C on top of near-surface InGaAs/GaAs quantum well structures. A significant passivation effect is seen as shown by up to 30 times higher photoluminescence intensity and up to seven times longer lifetime compared to uncoated reference samples. The improved optical properties are accompanied by a redshift of the quantum well photoluminescence peak likely caused by a combination of the nitridation of the GaAs capping layer and a surface coupling effect.
Keywords :
GaAs passivation , Aluminum nitride , Plasma-enhanced ALD
Journal title :
Applied Surface Science
Serial Year :
2010
Journal title :
Applied Surface Science
Record number :
1013217
Link To Document :
بازگشت