Title of article
Mechanical properties of the plasma-enhanced magnetron sputtering Si–C–N coatings Review Article
Author/Authors
Yanfeng Wang، نويسنده , , Zhengxian Li، نويسنده , , Jihong Du، نويسنده , , Baoyun Wang، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2010
Pages
5
From page
1
To page
5
Abstract
The mechanical properties of plasma-enhanced magnetron sputtering Si–C–N hard coatings with various compositions are characterized. The effect of chemical composition on the microstructure and properties of coating is investigated. The results show that the microstructure and mechanical properties of Si–C–N coatings are very sensitive to chemical composition. The nanocrystalline/amorphous composite structure is beneficial to the coatingʹs mechanical properties. It also reveals that Si–C–N coating with low Si and high C concentrations has the highest hardness (≥40 GPa) and the best wear property with dry friction coefficient about 0.2.
Keywords
Hard coatings , Magnetron sputtering , Wear property , Si–C–N
Journal title
Applied Surface Science
Serial Year
2010
Journal title
Applied Surface Science
Record number
1013260
Link To Document