Influence of standoff distance on the structure and properties of carbon coatings deposited by atmospheric plasma jet

Carbon coatings were deposited by atmospheric plasma jet. Influence of the distance between the exit of the plasma gun and a substrate (consequently temperature of the substrate) on properties of the coatings was investigated. The coatings deposited near to the exit of the plasma gun are porous with columnar structure, moderate hardness (∼10 GPa), and the lowest hydrogen (∼7 at.%) concentration. The coatings deposited at the larger standoff distance (>5 mm) have higher hydrogen (≤25 at.%) content and graphite-like structure. Most of the hydrogen in all coatings is bonded to the sp3 carbon (70–60 at.%) and predominantly forms methylene compounds. Decrease of standoff distance yields lower concentration of sp3 CH3 compounds and relative increase of amount of hydrogenated sp2 rings.