Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering

In this study, (TiVCrZrHf)N multi-component coatings with quinary metallic elements were deposited by reactive magnetron sputtering system. The composition, structure, and mechanical properties of the coatings deposited at different N2 flow rates were investigated. The (TiVCrZrHf)N coatings deposited at N2 flow rates of 0, 1, and 2 SCCM showed an amorphous structure, whereas those deposited at N2 flow rates of 4 and 6 SCCM showed a simple face-centered cubic solid solution structure. A saturated nitride coating was obtained for N2 flow of 4 SCCM and higher. By increasing N2 flow to 4 SCCM, the hardness and modulus reached a maximum value of 23.8 ± 0.8 and 267.3 ± 4.0 GPa, respectively.