Inductively coupled plasma mass spectrometric determination of ultra-trace elements in electronic-grade water and chemicals using dulcitol Original Research Article

A method is described for the determination of ultra-trace elements (Li, Be, Na, Mg, Al, K, Ca, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ga, Ge, Sr, Mo, Ag, Cd, Sn, Sb, Ba, Tl, Pb and Bi) in electronic-grade water and chemicals by inductively coupled plasma mass spectrometry (ICP-MS). In order to achieve the highly sensitive determination and to prevent spectral interference from matrix of chemicals, the sample was concentrated by a non-boiling evaporation technique. The presence of polyhydric alcohols having two or more hydroxyl groups in cis position, especially dulcitol, was effective in preventing vaporization loss of analytes such as Ti, Ge, Sn and Sb. The presence of dulcitol did not influence ICP-MS intensities for all the elements. This method was applied to the determination of ultra-trace impurities in electronic-grade water and ammonia water.