Spectroscopic ellipsometric characterization of approximant thin films of Al–Cr–Fe deposited on glass substrates

The reflection spectroscopic ellipsometric study of optical properties of thin films of Al–Cr–Fe is presented. PRPSE (polarizer, rotating polarizer spectroscopic ellipsometer) equipped with a quarter wave achromatic is used for thin films/ glasses analysis. Al–Cr–Fe approximant thin films were deposited from the vapor phase on the glass substrates. The optical constants were determined at room temperature in the spectral range from 500 to 800 nm. Surface layer on the glass substrates was treated as a mixture of voids and Al–Cr–Fe by using Bruggeman effective medium approximation. The surface oxidation has been identified as Al2O3 and the thin film thickness were found to be a few nanometers, and in agreement with transmission electron microscopy (TEM).