Fabrication and characterization of a novel wafer-level micro-electrode system for dielectrophoresis manipulation

Dielectrophoresis is a potential technique which can be employed to manipulate micro-/nano-particles, fabricate micro/nano-devices and test the properties of materials in fluid. Among the influences on dielectrophoretic manipulation, the electrode configuration that dictates the radiation pattern of electric field is a point out one. In this paper, a novel wafer-level planar micro-electrode system was designed and fabricated by rapid, low-cost micro-fabrication technologies. This low-cost platform can meet the primary needs of DEP manipulation, is ideal for mass production and can augment the accessibility of DEP devices to end-users lacking fabrication facilities or knowledge.