Synthesis and characterization of amorphous yttrium oxide layers by metal organic chemical solution deposition

The Solution Deposition Planarization method was successfully used for smoothing Ni-alloy tapes with initial surface roughness of 26.7 nm (on 40×40 μm2 area) and 12.6 nm (on 5×5 μm2 area). New precursor solutions were prepared from yttrium acetate and diethylenetriamine or ethylenediamine in MeOH and i-PrOH—alcohols with different viscosities. Using those solutions yttria films with the residual roughness Sa=0.4 nm (on 5×5 μm2 area) and Sa=7.6 nm (on 40×40 μm2 area) were deposited on the Ni-alloy tapes.