Selective growth of individual single-walled carbon nanotubes suspended between pillar structures

Single-walled carbon nanotubes (SWNTs) were grown on pillar-patterned Si and SiO2 substrates to form suspended nanotubes between pillar patterns. The growth was performed by chemical vapor deposition using methane and Fe catalysts. The SWNT yield was controlled by choosing the catalyst particle size and growth temperature. When the SWNT yield was low, individual SWNTs form between neighboring pillars. At higher yields, bundles of SWNTs formed. The suspended nanotubes were directly characterized by transmission electron microscopy.