Improvement of electrical contact at carbon nanotube/Pt by selective electron irradiation

We have demonstrated the fabrication process to obtain good electrical contact between carbon nanotube and Pt-coated cantilever for scanning probe microscopy. The selective electron beam irradiation under DC-biased condition in FE-SEM is effective in reducing contact resistance by orders of magnitudes. The current–voltage characteristic after the irradiation suggests that the fabricated contact is highly conductive and of ohmic character.