Title of article :
VECTOR HOPKINS MODEL RESEARCH BASED ON OFF-AXIS ILLUMINATION IN NANOSCALE LITHOGRAPHY
Author/Authors :
Yan P. Cao، نويسنده , , L. Cheng، نويسنده , , and X. Zhang ، نويسنده ,
Issue Information :
ماهنامه با شماره پیاپی سال 2009
Abstract :
Based on vector electromagnetic theory and the Waveguide Model, the vector Hopkins model is deduced. The model contains the vector Hopkins formula and the resist profile model of fast Optical Proximity Correction. The vector Hopkins formula considers inci
Journal title :
Progress In Electromagnetics Research
Journal title :
Progress In Electromagnetics Research
