Electronic properties of phosphorus-doped triode-type diamond field emission arrays

In this work, we present a novel scheme that involves a new fabrication process of gate structure metal–insulator–semiconductor (MIS) diode using IC technology. We use a bias-assisted microwave plasma chemical vapor deposition (BAMPCVD) system to synthesize P-doped and B-doped diamond. Based on our experimental results, it showed dendrite-like diamond with non-doped and nanotube-like diamond with B- or P- doping. Doping phosphorus or boron can enhance its electric characteristic by reducing the turn-on voltage and enhancing the emission current density. The turn-on voltage of non-doped, B-doped and P-doped is 15, 8 and 5 V, respectively. The field emission current (Ia) of non-doped, B-doped and P-doped is 4 μA (at 45 V), 76 μA (at 77 V) and 322 μA (at 120 V), respectively.