Title of article
Behaviour of plasma hydrogenated n-type silicon in aqueous fluoride media: comparison with non-hydrogenated silicon
Author/Authors
B. Benhaoua، نويسنده , , T. Kerbache، نويسنده , , A. Chari، نويسنده , , O. Gorochov، نويسنده ,
Issue Information
دوهفته نامه با شماره پیاپی سال 2004
Pages
8
From page
315
To page
322
Abstract
We investigate the electrochemical behaviour, in the dark, of hydrogenated n-type silicon (n-Si (H)) as function of the plasma hydrogenation duration. We also study the pore size microstructures and the flat band potential (Vfb). The results are compared with non-hydrogenated n-Si. An electrochemical reactionary mechanism is proposed and model is developed to explain these results.
Keywords
Capacitance–voltage , Dark current , Porous silicon , Plasma hydrogenation , Electrochemistry , Surface morphology
Journal title
Materials Chemistry and Physics
Serial Year
2004
Journal title
Materials Chemistry and Physics
Record number
1062299
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