Preparation and characterization of Sb-doped SnO2 thin films from colloidal precursors

Sb-doped SnO2 films have been prepared by the sol–gel method with the colloidal precursors. The colloidal precursors were prepared by adding urea into the SnCl4 and SbCl3 aqueous solution. The crystalline structure of the colloidal particles and the films are rutile-type structure examined by X-ray diffraction technique. The dependencies of electrical properties of the films on the firing temperature and Sb content have been studied. Conductivity and carrier concentration increase as the Sb concentration increases from 0 to 10%. The transmittance of the films firing at 600 °C was about 92% in the 450–800 nm wavelength range.