• Title of article

    Cathodic electrodeposition of RuO2 thin films from Ru(III)Cl3 solution

  • Author/Authors

    Bong-Ok Park، نويسنده , , C.D. Lokhande، نويسنده , , Hyung Sang Park، نويسنده , , Kwang-Deog Jung، نويسنده , , Oh-Shim Joo، نويسنده ,

  • Issue Information
    دوهفته نامه با شماره پیاپی سال 2004
  • Pages
    8
  • From page
    59
  • To page
    66
  • Abstract
    Ruthenium oxide (RuO2) films of different thicknesses have been cathodically deposited on titanium substrates under galvanostatic condition from aqueous acidic Ru(III)Cl3 solution. The deposition conditions and structural properties of these films have been studied. The X-ray diffraction (XRD) and transmission electron microscopy (TEM) studies revealed that as-deposited RuO2 film is nanocrystalline. The scanning electron microscopy (SEM) study showed that RuO2 film is porous and the surface morphology changes with film thickness.
  • Keywords
    Ruthenium oxide , Electrodeposition , Thin films , structural studies , SEM and TEM studies
  • Journal title
    Materials Chemistry and Physics
  • Serial Year
    2004
  • Journal title
    Materials Chemistry and Physics
  • Record number

    1062686