Arc plasma deposition of TiSiN/Ni nanoscale multilayered coatings

Nanostructured alternate TiSiN/Ni multilayer coatings were deposited by the cathodic arc technique on Si, C45 and M2 steel substrates in nitrogen atmosphere. The films were investigated for elemental and phase composition, texture, modulation periodicity, microstructure, residual stress, hardness, adhesion and tribological behavior using X-ray photoelectron spectroscopy (XPS), glow discharge optical spectroscopy (GDOS), high angle X-ray diffraction (XRD), X-ray reflectivity (XRR), surface profilometry, hardness and adhesion measurements, and tribological tests. The characteristics of the multilayers, with bilayer periods ranging from ∼7 to 27 nm, were compared with those of the TiSiN single layer coating. Depending on the modulation period, the TiSiN/Ni coatings exhibited lower internal stress (0.19–0.76 GPa) and better adhesion (critical loads in the range 51–68 N) when compared to TiSiN films (1.96 GPa and 32 N, respectively). The maximum hardness (29.1 GPa), with a value 1.2 times the rule-of-mixtures value, was measured for the coating with the bilayer period of about 15 nm. A good wear and friction performance was found.