Material selection for electrostatic microactuators using Ashby approach

Due to variety of materials available to any designer for a particular application, there is a need for a proper technique to select. This paper focuses on the optimum selection of materials for electrostatic microactuators using Ashby approach. In this work, performance indices and material indices have been developed for electrostatic actuators and thereafter material selection chart is plotted. The selection chart shows that for high actuation voltage and high actuation force, diamond is the best possible candidate followed by silicon carbide and silicon nitride. On the other hand, if high speed electrostatic actuator is desired, then aluminum is the best possible candidate followed by nickel and copper.