1530 V, 16.8 m(omega) . cm/sup 2/, 4H-SiC normally-off vertical junction field-effect transistor

The fabrication and characterisation of a 4H-SiC double-gated, normally-off vertical junction field-effect transistor (VJFET) without epitaxial regrowth, with an implanted vertical channel, is reported. A blocking voltage of 1530 V in the normally-off mode has been achieved with a drift layer of 15 (mu)m using a two-step junction termination extension. The VJFET shows a low specific on-resistance R/sub ON_SP/ of 16.8 m(omega) . cm/sup 2/.