Title of article
Advances in thick and thin film analysis using interferometry
Author/Authors
M. Conroy، نويسنده ,
Issue Information
ماهنامه با شماره پیاپی سال 2009
Pages
5
From page
502
To page
506
Abstract
The use of interferometry to measure transparent and semi-transparent films is becoming more and more important as understanding of the measurement becomes more widespread. Techniques for measurement of thick films of 1 μm or greater using interferometry have been available for some time but measurement of thin films using interferometry is a much newer technique, also the effect of films coatings on interferometry measurements in general is now becoming more widely understood. The measurement of thick and thin films using interferometry is discussed in this paper.
Keywords
Interferometry , Thick film , Metrology , Thin film
Journal title
Wear
Serial Year
2009
Journal title
Wear
Record number
1090483
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