• Title of article

    Advances in thick and thin film analysis using interferometry

  • Author/Authors

    M. Conroy، نويسنده ,

  • Issue Information
    ماهنامه با شماره پیاپی سال 2009
  • Pages
    5
  • From page
    502
  • To page
    506
  • Abstract
    The use of interferometry to measure transparent and semi-transparent films is becoming more and more important as understanding of the measurement becomes more widespread. Techniques for measurement of thick films of 1 μm or greater using interferometry have been available for some time but measurement of thin films using interferometry is a much newer technique, also the effect of films coatings on interferometry measurements in general is now becoming more widely understood. The measurement of thick and thin films using interferometry is discussed in this paper.
  • Keywords
    Interferometry , Thick film , Metrology , Thin film
  • Journal title
    Wear
  • Serial Year
    2009
  • Journal title
    Wear
  • Record number

    1090483