Auger spectroscopic investigation of a-C:H films on silicon microrelief substrates Original Research Article

Hydrogenated amorphous carbon films (a-C:H) grown on unheated Si with and without microrelief morphology substrates (MRS, FS) by chemical vapor deposition were investigated using scanning electron microscopy, Auger electron spectroscopy analysis and reflection electron diffraction methods. A difference in the Auger spectra was found in the dependence on the surface morphology of the substrate, the microrelief type and the film thickness. Auger line shapes similar to those for diamond were observed in the form of tetragonal pyramids when a-C:H films were grown on microrelief Si substrates.