Characterization of diamond-like carbon clusters deposited by pulsed ArF laser deposition Original Research Article

Structural and surface properties of diamond-like carbon (DLC) clusters deposited by pulsed ArF laser deposition on Si wafers, a-Si:H, and glass substrates are described. It was found that DLC films deposited in H2 ambient have a faceted morphology even at room temperature. Separated G (graphite) and D (disordered) Raman bands appeared for films deposited at high temperature (>300°C), and this phenomenon was more pronounced when the films were deposited in hydrogen than in vacuum. Faceted morphology was also observed for films deposited in vacuum condition at a substrate temperature above 200°C. The formation of carbon clusters was greater on the a-Si:H substrate and lower on the glass substrate when compared with the Si wafer.