Liquid reagent CVD of carbon. I. Processing and microstructure Original Research Article

The processing and microstructure of carbon coatings deposited using liquid reagent CVD were studied. High density pyrolytic carbon coatings were successfully deposited on graphite and molybdenum substrates from benzene and cyclohexane precursors. Very high deposition rates were obtained. Examination via transmission electron microscopy showed that the deposits were of the desired turbostratic nodular structure with low texture.