Title of article :
Electrostatic chuck as application of B/C/N ceramics
Author/Authors :
Kiyotoshi Fujii، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Pages :
1
From page :
1375
To page :
1375
Journal title :
Carbon
Serial Year :
2007
Journal title :
Carbon
Record number :
1122104
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=1122104
