Title of article :
The structural phases of non-crystalline carbon prepared by physical vapour deposition Original Research Article
Author/Authors :
D.W.M. Lau، نويسنده , , A. Moafi، نويسنده , , M.B. Taylor، نويسنده , , J.G. Partridge، نويسنده , , D.G. McCulloch، نويسنده , , R.C. Powles، نويسنده , , D.R. McKenzie، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2009
Pages :
8
From page :
3263
To page :
3270
Abstract :
The structure of non-crystalline carbon films produced using physical vapour deposition is studied as a function of ion impact energy and substrate temperature. The average ion energy was varied from 10 eV to 820 eV using magnetron sputtering and cathodic
Journal title :
Carbon
Serial Year :
2009
Journal title :
Carbon
Record number :
1126368
Link To Document :
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