Monte Carlo simulations of the transport of sputtered particles Original Research Article

Program SPATS models the transport of neutral particles during magnetron sputtering deposition. The 3D Monte Carlo simulation provides information about spatial distribution of the fluxes, density of the sputtered particles in the chamber glow discharge area, and kinetic energy distribution of the arrival flux. Collision events are modelled by scattering in Biersackʹs potential, Lennard-Jones potential, or by binary hard sphere collision approximation. The code has an interface for Monte Carlo TRIM simulated results of the sputtered particles.