3D-model of epitaxial growth on porous {111} and {100} Si surfaces Original Research Article

A 3D Monte Carlo model of epitaxial and annealing processes on (111) and (100) surfaces of diamond-like crystals was developed. Simulations of epitaxial growth on porous Si(111) and Si(100) surfaces using this model were carried out. Distinct relief is formed over sealing pores due to diffusion differences on these surfaces. A smooth solid layer is formed on the (111) surface whereas pyramidal pits faceted by (111) planes are created over pores on the (100) surface. The deposited dose necessary for pore sealing is one order of magnitude greater on the Si(100) than on the Si(111) surface.