Four dimensional Fokker–Planck solver for electron kinetics in collisional gas discharge plasmas Original Research Article

A general-purpose, four-dimensional Fokker–Planck (FP) solver has been developed for simulation of electron kinetics in collisional gas discharge plasmas. This paper describes details of the numerical implementation and applications to inductively coupled plasmas, capacitively coupled plasmas, and dielectric barrier discharges. The FP solver offers a very good compromise between physical accuracy and numerical efficiency for simulations of electron energy distribution function in gas discharges.