Irradiation induced alloying and formation of amorphous films in Co–Mo system during ion beam assisted deposition Original Research Article

The amorphization of Co–Mo multilayered films was investigated by ion beam assisted deposition (IBAD). The amorphous phase was obtained within the composition range of 35–60 at.% Co fraction. When Co content in the films was less than 35 at.%, a Mo-based bcc solid solution was observed, and the maximal solubility of Mo in Co was about 40 at.%. The Gibbs free-energy diagram of the Co–Mo system was calculated according to Miedema’s model and the mechanism of phase evolution was interpreted in terms of thermodynamics. The kinetics of IBAD was also considered.