Nanocomposite Ti–B–N coatings synthesized by reactive arc evaporation Original Research Article

Nanocomposite Ti–B–N coatings have been prepared by reactive arc evaporation from Ti–B compound targets. The highly ionized flux of film-forming species was utilized to synthesize a promising nanocrystalline metastable supersaturated solid solution of boron in TiN at lower nitrogen fractions. The combined results from elastic recoil detection, X-ray photoelectron spectroscopy, X-ray diffraction, high-resolution transmission electron microscopy and selected area electron diffraction indicate that the additional nitrogen incorporated at higher partial pressures triggers the formation of a separate amorphous BN matrix phase surrounding the 6–8 nm sized face-centered cubic crystallites. A maximum in the hardness is obtained for the strained TiBN crystallites surrounded by a small fraction of boron synthesized at a nitrogen fraction of 0.1, while the formation of the amorphous BN phase leads to lower values.