Study on the gas phase HBr-catalyzed reaction between UF6 and SiH4 at room temperature Original Research Article

The gas phase HBr-catalyzed reaction UF6 + SiH4 at room temperature and its kinetic mechanism were investigated. It was found that this catalyzed reaction followed the first-order kinetics, and the reaction rate constant was proportional to the concentration of catalyst HBr, e.g. the measured rate constants were 0.75 × 10−3, 1.58 × 10−3 and 3.00 × 10−3s−1 at the respective concentrations of HBr at 0.5 × 133.3, 1.0 × 133.3 and 2.0 × 133.3Pa. The proposed kinetic mechanism of the HBr-catalyzed reaction was in good accordance with the measured results.